Materials processing with high ablation quality: Selective drilling, cutting, structuring, surface structuring, specifi cally in semiconductor technology. Metals, semiconductors, ceramics, glass and other materials have been micromachined in very high quality and efficiently in LUMERA LASER's application lab with ~10 ps pulses at energy densities in the order of 1 J/cm2. For target areas of ~10x10 μm2 this translates to ~1 μJ pulse energy. Increasing the pulse repetition rate up to 500 kHz. Increases the material removal rate linearly (with constant pulse energy and geometry). Applications, in addition to micromachining, include: R/D, NLO, THzgeneration, ps-spectroscopy, satellite ranging and material research.
Our job shop provides micromaching business!
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